PSH14RT scan head is specifically developed for laser resistor trimming. It is suitable for resistor trimming applications that require the curvature of less than ±1.5 μm and a line spacing accuracy of less than ±1.5 μm.
The product is featured with the compact, light-weighted design while delivering good cost-effectiveness and high speed.
| Maximum allowed average laser power(1) | 500 W |
| Aperture | 14 mm |
| Typical scan angle(2) | ± 10° |
| Tracking error | 0.25 ms |
| Step response(1% of full scale) | 0.5 ms |
| Speed | |
| Positioning / Jump(3) | 9 m/s |
| Line scan(3) | 9 m/s |
| Vector scan(4) | 2 m/s |
| Good writing quality(3)(5) | 600 cps |
| Precision | |
| Linearity | 99.90 % |
| Repeatability | 2 μrad |
| Temperature drift | |
| Offset(μrad/℃) | 20 |
| Gain(μrad/℃) | 20 |
| Long-term drift(at contant ambient temperature around 25 ℃) | |
| Offset(μrad) | 40 |
| Gain(μrad) | 60 |
| Operating temperature range | 25 ℃ ± 10 ℃ |
| Signal interface | Analog:± 10 V or ± 5 V |
Digital:XY2-100, PRS422 | |
| Input power requirement(DC) | ± 15 V @ 5 A Max RMS |
| Net weight | |
| Volume |
Note:
(1) For laser wavelength 1030-1090 nm.
(2) All angles are in mechanical degrees.
(3) With F-Theta objective f = 163 mm. Speed value varies correspondingly with different focal lengths.
(4) Reapeatibility and temperature drift are measured within this speed.
(5) Single-stroke font with 1 mm height.